Novel types of guided S.A.W. reflectors for micro-resonators

Surface acoustic waves (SAWs) for micrograting reflectors are characterized. Based on the perturbation theory, eight different types of structures on an acoustic waveguide are analyzed. Results of simulations of all eight types of corrugation structures are evaluated in order to find the least leaky waveguide, the most efficient reflector (with minimum necessary perturbations), and the optimal mode shape for improved performances. General design curves are presented in order to illustrate the behavior of the incident and reflected waves under a variety of structural conditions. Analytic expressions for the calculations of the mode amplitude and mode shape, and for general acoustic corrugations are derived. Simulation results are presented.