תקציר
This study presents an original approach on how to generate a radiator with an emissivity less than one by using a conventional blackbody and a screen with a defined area density of holes. This is needed for the calibration of infrared (IR) radiometry, which is a very useful form of temperature measurement in industrial, scientific, and medical applications. One of the major sources of errors in IR radiometry is the emissivity of the surface being measured. Emissivity is a physically well-defined parameter, but in real experiments, it may be influenced by many factors: surface texture, spectral properties, oxidation, and aging of surfaces. While commercial blackbodies are prevalent, the much-needed grey bodies with a known emissivity are unavailable. This work describes a methodology for how to calibrate radiometers in the lab or in the factory or FAB using the “screen approach” and a novel thermal sensor dubbed Digital TMOS. The fundamental physics required to appreciate the reported methodology is reviewed. The linearity in emissivity of the Digital TMOS is demonstrated. The study describes in detail how to obtain the perforated screen as well as how to do the calibration.
שפה מקורית | אנגלית |
---|---|
מספר המאמר | 974 |
כתב עת | Micromachines |
כרך | 14 |
מספר גיליון | 5 |
מזהי עצם דיגיטלי (DOIs) | |
סטטוס פרסום | פורסם - מאי 2023 |