@inproceedings{5fe1818db1d743209bacdd6614793118,
title = "Integrating Critical Queue Time Constraints into SMT2020 Simulation Models",
abstract = "In this paper, we study the impact of critical queue time (CQT) constraints in semiconductor wafer fabrication facilities (wafer fabs). Process engineers impose CQT constraints that require wafers to start a subsequent operation within a given time window after a certain operation is completed to prevent native oxidation and contamination effects on the wafer surface. We equip dataset 2 of the SMT2020 testbed with production control logic to avoid CQT constraint violations. Therefore, two different CQT-aware dispatching rules and a combination of a lot stopping strategy with these rules are proposed. The effect of the production control strategies is investigated by means of a simulation study. We show that the number of CQT violations can be reduced without large deteriorations of global performance measures such as cycle time and throughput.",
author = "Denny Kopp and Michael Hassoun and Adar Kalir and Lars Monch",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 Winter Simulation Conference, WSC 2020 ; Conference date: 14-12-2020 Through 18-12-2020",
year = "2020",
month = dec,
day = "14",
doi = "10.1109/WSC48552.2020.9383889",
language = "אנגלית",
series = "Proceedings - Winter Simulation Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1813--1824",
editor = "K.-H. Bae and B. Feng and S. Kim and S. Lazarova-Molnar and Z. Zheng and T. Roeder and R. Thiesing",
booktitle = "Proceedings of the 2020 Winter Simulation Conference, WSC 2020",
address = "ארצות הברית",
}