Electrostatic frequency tuning of flat and curved microplates

Keyphrases

• Frequency Tuning 100%
• Curved Plate 100%
• Flat Plate 66%
• Model Prediction 33%
• Finite Element Model 33%
• Equilibrium State 33%
• Electrostatic Force 33%
• Finite Element Analysis 33%
• Electrostatic Loading 33%
• Snap-through 33%
• Residual Stress 33%
• Limit Point 33%
• DC Voltage 33%
• Resonance Behavior 33%
• Frequency Sensitivity 33%
• Softening Nonlinearity 33%
• Hardening Nonlinearity 33%
• Frequency Tunability 33%
• Stamp Technique 33%

Engineering

• Electrostatic Force 100%
• Experimental Result 66%
• Flat Plate 66%
• Nonlinearity 66%
• Model Prediction 33%
• Finite Element Modeling 33%
• Bistables 33%
• Snap-Through 33%
• Equilibrium State 33%
• Residual Stress 33%
• Finite Element Analysis 33%