Atomic force microscopy investigation of dislocation structures and deformation characteristics in neutron irradiated silicon detectors

G. Golan, E. Rabinovich, A. Inberg, A. Axelevitch, M. Oksman, Y. Rosenwaks, A. Kozlovsky, P. J. Rancoita, M. Rattagi, A. Seidman, N. Croitoru

פרסום מחקרי: פרק בספר / בדוח / בכנספרסום בספר כנסביקורת עמיתים

תקציר

The structure, microhardness and deformation character for silicon detectors were investigated following a neutron irradiation, using optical and Atomic Force (AFM) microscopes. The results of these investigations have given an important contribution to the understanding of silicon damage process by neutron irradiation. It was shown that in the interval of neutron fluences 9.9×1010≤Φ≤3.12×1015 n/cm 2 the damage is accumulative (from small punctual to large defects). The abrupt changes of microstructure together with the electrical and mechanical properties were found for Φ≥1014n/cm2 Different kinds of defects (dislocations and interstitials) and their complexes appeared under neutron irradiation. For all fluences the regions ("White" -"W") with a microhardness smaller than in nonirradiated silicon were observed. Microhardness is larger in the regions where the concentration of dislocation loops is high. The "W", regions have a small number of the dislocations loops, and single punctual defects were seen there using Atomic Force Microscope. The dislocation loops are placed in specific ("Black"-"B") regions, which increase in size with the increase of neutron fluence due to a process of vacancies and interstitials accumulation.

שפה מקוריתאנגלית
כותר פרסום המארח2000 22nd International Conference on Microelectronics, MIEL 2000 - Proceedings
מוציא לאורIEEE Computer Society
עמודים363-366
מספר עמודים4
מסת"ב (מודפס)0780352351, 9780780352353
מזהי עצם דיגיטלי (DOIs)
סטטוס פרסוםפורסם - 2000
פורסם באופן חיצוניכן
אירוע2000 22nd International Conference on Microelectronics, MIEL 2000 - Nis, סרביה
משך הזמן: 14 מאי 200017 מאי 2000

סדרות פרסומים

שם2000 22nd International Conference on Microelectronics, MIEL 2000 - Proceedings
כרך1

כנס

כנס2000 22nd International Conference on Microelectronics, MIEL 2000
מדינה/אזורסרביה
עירNis
תקופה14/05/0017/05/00

טביעת אצבע

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