The Mechanism of Laser-Induced Vertical Links

Keyphrases

• Auger Electron Spectroscopy 33%
• Beam Conditions 33%
• Conductive Film 33%
• Cross-linked Structure 66%
• Electrical Measurements 33%
• Insulating Film 33%
• Insulating Substrate 33%
• Insulation 33%
• Laser Beam Applications 33%
• Laser Beams 33%
• Laser Pulse 33%
• Laser-induced 100%
• Metallization 33%
• Molten Zone 33%
• Ohmic Resistance 33%
• Puddling 33%
• Scanning Electron Microscopy 33%
• Signaling Pathway 33%
• Silicon Dioxide 33%
• Silicon Nitride 33%
• Substrate Condition 33%
• Vertical Link 100%
• Very Large Scale Integration 33%
• Wafer Bonding 33%
• X-ray Photoelectron Spectroscopy 33%

Material Science

• Auger Electron Spectroscopy 100%
• Conductive Film 100%
• Film 100%
• Laser Pulse 100%
• Photoemission Spectroscopy 100%
• Scanning Electron Microscopy 100%
• Silicon Dioxide 100%
• Silicon Nitride 100%

Engineering

• Conductive 100%
• Electrical Measurement 50%
• Essential Feature 50%
• Laser Beams 100%
• Metallizations 50%
• Nitride 50%
• Ohmic Resistance 50%
• Ray Photoelectron Spectroscopy 50%
• Signal Path 50%
• Silicon Dioxide 50%
• WSI Circuits 50%