The contribution of HFO 2 bulk oxide traps to dynamic NBTI in PMOSFET'S

B. Zhu, J. S. Suehle, E. Vogel, J. B. Bernstein

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

The Negative Bias Temperature Instability (NBTI) under pulsed bias stress conditions of devices with HfO 2 and SiO 2 gate dielectrics are studied and compared. The pulsed stress frequency responses of threshold voltage shift (ΔV th) are quite different for both dielectrics as well as the acceleration parameters. Bulk traps in the HfO 2 film is used to explain these differences. Furthermore, it is shown that cautions must be taken when extrapolating the device lifetime of HfO 2 gate dielectrics.

Original languageEnglish
Title of host publication2005 IEEE International Reliability Physics Symposium Proceedings, 43rd Annual
Pages533-537
Number of pages5
StatePublished - 2005
Externally publishedYes
Event2005 IEEE International Reliability Physics Symposium Proceedings, 43rd Annual - San Jose, CA, United States
Duration: 17 Apr 200521 Apr 2005

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
ISSN (Print)1541-7026

Conference

Conference2005 IEEE International Reliability Physics Symposium Proceedings, 43rd Annual
Country/TerritoryUnited States
CitySan Jose, CA
Period17/04/0521/04/05

Keywords

  • Bulk oxide traps
  • Hafnium oxide
  • High-k gate dielectrics
  • Negative bias temperature instability

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