Surface acoustic wave photonic devices in silicon on insulator

Dvir Munk, Moshe Katzman, Mirit Hen, Maayan Priel, Moshe Feldberg, Tali Sharabani, Shahar Levy, Arik Bergman, Avi Zadok

Research output: Contribution to journalArticlepeer-review

65 Scopus citations


Opto-mechanical interactions in planar photonic integrated circuits draw great interest in basic research and applications. However, opto-mechanics is practically absent in the most technologically significant photonics platform: silicon on insulator. Previous demonstrations required the under-etching and suspension of silicon structures. Here we present surface acoustic wave-photonic devices in silicon on insulator, up to 8 GHz frequency. Surface waves are launched through absorption of modulated pump light in metallic gratings and thermo-elastic expansion. The surface waves are detected through photo-elastic modulation of an optical probe in standard race-track resonators. Devices do not involve piezo-electric actuation, suspension of waveguides or hybrid material integration. Wavelength conversion of incident microwave signals and acoustic true time delays up to 40 ns are demonstrated on-chip. Lastly, discrete-time microwave-photonic filters with up to six taps and 20 MHz-wide passbands are realized using acoustic delays. The concept is suitable for integrated microwave-photonics signal processing.

Original languageEnglish
Article number4214
JournalNature Communications
Issue number1
StatePublished - 1 Dec 2019
Externally publishedYes


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