Single Electrode Bidirectional Switching of Latchable Prestressed Bistable Micromechanical Beams

Keyphrases

• Applied Voltage 20%
• Asymmetric Response 20%
• Axial Compressive 20%
• Axial Dynamics 20%
• Axial Stress 20%
• Bidirectional Operation 20%
• Bidirectional Switching 100%
• Compact Footprint 20%
• Dynamic Response 20%
• Dynamic Switching 20%
• Electrostatically Actuated 20%
• Joule Heating 20%
• Logic Element 20%
• Low Power Consumption 20%
• Memory Power Consumption 20%
• Micromechanics 100%
• Model Prediction 20%
• Non-volatile Memory 20%
• Prestress 100%
• Reduced Order Model 20%
• Single Crystal Si 20%
• Single Electrode 100%
• Stable State 20%
• Symmetry Breaking 40%
• Wide Beam 20%

Engineering

• Applied Voltage 25%
• Axial Dynamic 25%
• Axial Stress 25%
• Bistables 100%
• Building Block 25%
• Dynamic Condition 25%
• Dynamic Response 25%
• Dynamic Switching 25%
• Experimental Finding 25%
• Low Power Consumption 25%
• Model Prediction 25%
• Nonvolatile Memory 25%
• Prestress 100%
• Reduced Order Model 25%
• Stable State 25%
• Stress Condition 25%

Material Science

• Single Crystal 100%