Scalability study of laser-induced vertical make-link structure

Keyphrases

• Laser-induced 100%
• Cross-linked Structure 100%
• Scalability Study 100%
• Interlevel Dielectrics 50%
• Downscaling 25%
• Two-level 25%
• Laser Beam Parameter 25%
• Integrated Application 25%
• Spot Size 25%
• Metallization 25%
• Size Mismatch 25%
• Focused Ion Beam 25%
• Thick Metal 25%
• Processing System 25%
• Laser Processing 25%
• Very Large Scale Integration 25%
• Commercially Viable 25%
• Spot Positioning 25%
• Semiconductor Fabrication 25%
• Processing Technology 25%
• Positioning Error 25%
• Fabrication Technology 25%
• Cross-sectional Image 25%

Engineering

• Dielectrics 100%
• Interconnects 100%
• Limitations 50%
• Spot Size 50%
• Metallizations 50%
• Focused Ion Beam 50%
• Laser Processing 50%
• Processing System 50%
• VLSI Circuits 50%
• Simple Equation 50%
• Semiconductor Fabrication 50%
• Processing Technology 50%
• Laser Beams 50%