Ring etching zones on magnetron sputtering targets

Keyphrases

• Internal Arrangement 50%
• Magnetron Sputtering Target 100%
• Ring-like Structures 50%
• Sputtering Parameters 50%
• Sputtering Target 50%
• Vacuum Chamber 50%

Engineering

• Internals 50%
• Magnetron 100%
• Target Material 50%
• Theoretical Investigation 50%

Material Science

• Magnetron Sputtering 100%