Ring etching zones on magnetron sputtering targets

G. Golan; A. Axelevitch

doi:10.1016/S0040-6090(96)09498-9

Ring etching zones on magnetron sputtering targets

G. Golan, A. Axelevitch

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

A practical and theoretical investigation into a method for estimating the forms and dimensions of etching zones on magnetron sputtering targets is presented. This estimation is based on detailed geometry considerations of the internal arrangement of the vacuum chamber and the sputtering parameters. It is proved theoretically and experimentally that etching zones on sputtering targets are in a ring shape and that their location and dimensions are independent on the target material or dimensions.

Original language	English
Pages (from-to)	72-77
Number of pages	6
Journal	Thin Solid Films
Volume	300
Issue number	1-2
DOIs	https://doi.org/10.1016/S0040-6090(96)09498-9
State	Published - 28 May 1997
Externally published	Yes

Keywords

Coatings
Corrosion
Ion bombardment
Sputtering

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10.1016/S0040-6090(96)09498-9

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abstract = "A practical and theoretical investigation into a method for estimating the forms and dimensions of etching zones on magnetron sputtering targets is presented. This estimation is based on detailed geometry considerations of the internal arrangement of the vacuum chamber and the sputtering parameters. It is proved theoretically and experimentally that etching zones on sputtering targets are in a ring shape and that their location and dimensions are independent on the target material or dimensions.",

keywords = "Coatings, Corrosion, Ion bombardment, Sputtering",

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AU - Golan, G.

AU - Axelevitch, A.

PY - 1997/5/28

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AB - A practical and theoretical investigation into a method for estimating the forms and dimensions of etching zones on magnetron sputtering targets is presented. This estimation is based on detailed geometry considerations of the internal arrangement of the vacuum chamber and the sputtering parameters. It is proved theoretically and experimentally that etching zones on sputtering targets are in a ring shape and that their location and dimensions are independent on the target material or dimensions.

KW - Coatings

KW - Corrosion

KW - Ion bombardment

KW - Sputtering

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Ring etching zones on magnetron sputtering targets

Abstract

Keywords

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