Ring etching zones on magnetron sputtering targets

G. Golan, A. Axelevitch

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


A practical and theoretical investigation into a method for estimating the forms and dimensions of etching zones on magnetron sputtering targets is presented. This estimation is based on detailed geometry considerations of the internal arrangement of the vacuum chamber and the sputtering parameters. It is proved theoretically and experimentally that etching zones on sputtering targets are in a ring shape and that their location and dimensions are independent on the target material or dimensions.

Original languageEnglish
Pages (from-to)72-77
Number of pages6
JournalThin Solid Films
Issue number1-2
StatePublished - 28 May 1997
Externally publishedYes


  • Coatings
  • Corrosion
  • Ion bombardment
  • Sputtering


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