TY - GEN
T1 - Optimizing capacity assignment of multiple identical metrology tools
AU - Dauzère-Pérès, Stéphane
AU - Hassoun, Michael
AU - Sendon, Alejandro
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/7/2
Y1 - 2016/7/2
N2 - In modern semiconductor manufacturing facilities, metrology capacity is becoming limited because of the high equipment cost. This paper studies the problem of optimally assigning the capacity of multiple identical metrology tools in order to minimize the risk of defective wafers on heterogeneous production machines. We assume that the output of each production machine is assigned to only one metrology tool. The resulting problem is formulated as a Multiple Choice Multiple Knapsack Problem (MCMKP), which combines the Multiple Choice Knapsack Problem and the Multiple Knapsack Problem and does not appear to have been studied in the literature. A greedy heuristic and an improving heuristic are also proposed. Numerical experiments are performed on randomly generated instances to analyze and compare the solutions of the heuristics with solutions obtained with a standard solver.
AB - In modern semiconductor manufacturing facilities, metrology capacity is becoming limited because of the high equipment cost. This paper studies the problem of optimally assigning the capacity of multiple identical metrology tools in order to minimize the risk of defective wafers on heterogeneous production machines. We assume that the output of each production machine is assigned to only one metrology tool. The resulting problem is formulated as a Multiple Choice Multiple Knapsack Problem (MCMKP), which combines the Multiple Choice Knapsack Problem and the Multiple Knapsack Problem and does not appear to have been studied in the literature. A greedy heuristic and an improving heuristic are also proposed. Numerical experiments are performed on randomly generated instances to analyze and compare the solutions of the heuristics with solutions obtained with a standard solver.
UR - http://www.scopus.com/inward/record.url?scp=85014249783&partnerID=8YFLogxK
U2 - 10.1109/WSC.2016.7822308
DO - 10.1109/WSC.2016.7822308
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AN - SCOPUS:85014249783
T3 - Proceedings - Winter Simulation Conference
SP - 2709
EP - 2718
BT - 2016 Winter Simulation Conference
A2 - Roeder, Theresa M.
A2 - Frazier, Peter I.
A2 - Szechtman, Robert
A2 - Zhou, Enlu
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2016 Winter Simulation Conference, WSC 2016
Y2 - 11 December 2016 through 14 December 2016
ER -