Optimizing capacity assignment of multiple identical metrology tools

Stéphane Dauzère-Pérès, Michael Hassoun, Alejandro Sendon

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations


In modern semiconductor manufacturing facilities, metrology capacity is becoming limited because of the high equipment cost. This paper studies the problem of optimally assigning the capacity of multiple identical metrology tools in order to minimize the risk of defective wafers on heterogeneous production machines. We assume that the output of each production machine is assigned to only one metrology tool. The resulting problem is formulated as a Multiple Choice Multiple Knapsack Problem (MCMKP), which combines the Multiple Choice Knapsack Problem and the Multiple Knapsack Problem and does not appear to have been studied in the literature. A greedy heuristic and an improving heuristic are also proposed. Numerical experiments are performed on randomly generated instances to analyze and compare the solutions of the heuristics with solutions obtained with a standard solver.

Original languageEnglish
Title of host publication2016 Winter Simulation Conference
Subtitle of host publicationSimulating Complex Service Systems, WSC 2016
EditorsTheresa M. Roeder, Peter I. Frazier, Robert Szechtman, Enlu Zhou
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages10
ISBN (Electronic)9781509044863
StatePublished - 2 Jul 2016
Event2016 Winter Simulation Conference, WSC 2016 - Arlington, United States
Duration: 11 Dec 201614 Dec 2016

Publication series

NameProceedings - Winter Simulation Conference
ISSN (Print)0891-7736


Conference2016 Winter Simulation Conference, WSC 2016
Country/TerritoryUnited States


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