Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load

Lior Medina, Rivka Gilat, Bojan R. Ilic, Slava Krylov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage-deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self-sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self-excitation.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages785-788
Number of pages4
ISBN (Electronic)9781509050789
DOIs
StatePublished - 23 Feb 2017
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 22 Jan 201726 Jan 2017

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/TerritoryUnited States
CityLas Vegas
Period22/01/1726/01/17

Keywords

  • Bistability
  • Curved micromechanical beam
  • Electrostatic actuation
  • MEMS/NEMS
  • Self-excitation

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