On improving the predictability of cycle time in an NVM fab by correct segmentation of the process

Michael Hassoun

doi:10.1109/TSM.2013.2283262

On improving the predictability of cycle time in an NVM fab by correct segmentation of the process

Michael Hassoun

Department of Industrial Engineering and Management

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

Based on a simulated fab, we first show that forecasting the steady state cycle time of process segments is possible based on certain segment characteristics. We then show that the cycle time predictability is highly dependent on the choice of the segmentation, with the more efficient segmentation corresponding to the product layers.

Original language	English
Article number	6607229
Pages (from-to)	613-618
Number of pages	6
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	26
Issue number	4
DOIs	https://doi.org/10.1109/TSM.2013.2283262
State	Published - 2013

Keywords

Cycle time
Data mining
Production management
Semiconductors
Simulation

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10.1109/TSM.2013.2283262

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On improving the predictability of cycle time in an NVM fab by correct segmentation of the process

Abstract

Keywords

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