Abstract
A novel target-holder construction for sputtering machines was developed and found to be most useful and effective for multi-target processes. The main advantages of this target holder are that it guarantees a good contact between the target material and the water cooled surface of the target-holder, it enables a quick target replacement, it provides a shielding protection against the rest of the non operative areas of the target holder and it improves the sputtering machine maintenance process.
| Original language | English |
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| Pages | 456-458 |
| Number of pages | 3 |
| State | Published - 1996 |
| Externally published | Yes |
| Event | Proceedings of the 1996 19th Convention of Electrical and Electronics Engineers in Israel - Jerusalem, Isr Duration: 5 Nov 1996 → 6 Nov 1996 |
Conference
| Conference | Proceedings of the 1996 19th Convention of Electrical and Electronics Engineers in Israel |
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| City | Jerusalem, Isr |
| Period | 5/11/96 → 6/11/96 |