Novel sputtering method for Pd-Al2O3 W transparent conductive coatings

A. Axelevitch, G. Golan, E. Rabinovitch, R. Margolin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Transparent conductive layers like indium tin oxide (ITO) or zinc oxide, that are commonly used as signal electrodes of vidicon television tubes, have an absorption edge in the visible range (350-400 nm) and therefore are not transparent in the ultra-violet (W). We have developed the Pd-Al2O3 thin film structure appropriated as a signal electrode for the vidicon operating in near W area. The films were deposited using a novel sputtering method. The 20 Ä thick Pd layer served as the conducting plate while the 30-50 A° thick Al2O3 coating functioned as the transparent protective film. The obtained signal plates had a sheet resistance of 2.5 K and a transparency coefficient of 71% at a wavelength of 250 nm, which is suitable for near ultraIviolet applications. The main advantage of vidicons equipped with such signal plates is that their dark current was less than 0.05 nA.

Original languageEnglish
Title of host publication21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages409-412
Number of pages4
ISBN (Electronic)0780358422, 9780780358423
DOIs
StatePublished - 2000
Externally publishedYes
Event21st IEEE Convention of the Electrical and Electronic Engineers in Israel, IEEEI 2000 - Tel-Aviv, Israel
Duration: 11 Apr 200012 Apr 2000

Publication series

Name21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings

Conference

Conference21st IEEE Convention of the Electrical and Electronic Engineers in Israel, IEEEI 2000
Country/TerritoryIsrael
CityTel-Aviv
Period11/04/0012/04/00

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