Abstract
A thin film structure of Pd-Al2O3 was developed as a signal plate for ultraviolet (UV) vidicon television picture tubes. The Pd-Al2O3 films were deposited using a novel sputtering method. The 20 angstroms thick Pd layer served as a conducting plate while the 30-50 angstroms thick Al2O3 layer functioned as a transparent protective passivation film. The obtained signal plates had a sheet resistance of 2.5 kΩ and a transparency coefficient of 71% at a wavelength of 250 nm, which is suitable for near-UV applications. The main advantage of vidicons equipped with such signal plates is its less than 0.05 nA dark current.
| Original language | English |
|---|---|
| Pages (from-to) | 469-473 |
| Number of pages | 5 |
| Journal | Microelectronics Journal |
| Volume | 31 |
| Issue number | 6 |
| DOIs | |
| State | Published - 30 Jun 2000 |
| Externally published | Yes |