Novel sputtering method for Pd-Al2O3 UV transparent conductive coatings

G. Golan; A. Axelevitch

doi:10.1016/S0026-2692(99)00148-2

Novel sputtering method for Pd-Al₂O₃ UV transparent conductive coatings

G. Golan, A. Axelevitch

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

A thin film structure of Pd-Al₂O₃ was developed as a signal plate for ultraviolet (UV) vidicon television picture tubes. The Pd-Al₂O₃ films were deposited using a novel sputtering method. The 20 angstroms thick Pd layer served as a conducting plate while the 30-50 angstroms thick Al₂O₃ layer functioned as a transparent protective passivation film. The obtained signal plates had a sheet resistance of 2.5 kΩ and a transparency coefficient of 71% at a wavelength of 250 nm, which is suitable for near-UV applications. The main advantage of vidicons equipped with such signal plates is its less than 0.05 nA dark current.

Original language	English
Pages (from-to)	469-473
Number of pages	5
Journal	Microelectronics Journal
Volume	31
Issue number	6
DOIs	https://doi.org/10.1016/S0026-2692(99)00148-2
State	Published - 30 Jun 2000
Externally published	Yes

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10.1016/S0026-2692(99)00148-2

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title = "Novel sputtering method for Pd-Al2O3 UV transparent conductive coatings",

abstract = "A thin film structure of Pd-Al2O3 was developed as a signal plate for ultraviolet (UV) vidicon television picture tubes. The Pd-Al2O3 films were deposited using a novel sputtering method. The 20 angstroms thick Pd layer served as a conducting plate while the 30-50 angstroms thick Al2O3 layer functioned as a transparent protective passivation film. The obtained signal plates had a sheet resistance of 2.5 kΩ and a transparency coefficient of 71% at a wavelength of 250 nm, which is suitable for near-UV applications. The main advantage of vidicons equipped with such signal plates is its less than 0.05 nA dark current.",

author = "G. Golan and A. Axelevitch",

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AU - Axelevitch, A.

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AB - A thin film structure of Pd-Al2O3 was developed as a signal plate for ultraviolet (UV) vidicon television picture tubes. The Pd-Al2O3 films were deposited using a novel sputtering method. The 20 angstroms thick Pd layer served as a conducting plate while the 30-50 angstroms thick Al2O3 layer functioned as a transparent protective passivation film. The obtained signal plates had a sheet resistance of 2.5 kΩ and a transparency coefficient of 71% at a wavelength of 250 nm, which is suitable for near-UV applications. The main advantage of vidicons equipped with such signal plates is its less than 0.05 nA dark current.

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Novel sputtering method for Pd-Al₂O₃ UV transparent conductive coatings

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