Novel sputtering method for Pd-Al2O3 UV transparent conductive coatings

G. Golan, A. Axelevitch

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

A thin film structure of Pd-Al2O3 was developed as a signal plate for ultraviolet (UV) vidicon television picture tubes. The Pd-Al2O3 films were deposited using a novel sputtering method. The 20 angstroms thick Pd layer served as a conducting plate while the 30-50 angstroms thick Al2O3 layer functioned as a transparent protective passivation film. The obtained signal plates had a sheet resistance of 2.5 kΩ and a transparency coefficient of 71% at a wavelength of 250 nm, which is suitable for near-UV applications. The main advantage of vidicons equipped with such signal plates is its less than 0.05 nA dark current.

Original languageEnglish
Pages (from-to)469-473
Number of pages5
JournalMicroelectronics Journal
Volume31
Issue number6
DOIs
StatePublished - 30 Jun 2000
Externally publishedYes

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