TY - JOUR
T1 - Novel imaging method in scanning acoustic microscopy for thin films
AU - Golan, G.
AU - Pitt, C. W.
PY - 1996/10
Y1 - 1996/10
N2 - A novel virtual cavity scanning acoustic microscope (VSAM), in which a resonating acoustic cavity is formed by a PZT plate mirror and an acoustic lens, has been developed. Resonance conditions were obtained by placing a PZT mirror in the focal plane of the acoustic lens and air bubble samples were examined. Practical geometry conditions and expressions for the acoustic resonance quality factor and loss, are given. This resonance phenomenon is used for high amplification of small acoustic signals and for the signature identification of surface and subsurface soft features in acoustic microscopy. A dedicated 3D image processing software has been used to extract detailed images of the scanned objects in resonance.
AB - A novel virtual cavity scanning acoustic microscope (VSAM), in which a resonating acoustic cavity is formed by a PZT plate mirror and an acoustic lens, has been developed. Resonance conditions were obtained by placing a PZT mirror in the focal plane of the acoustic lens and air bubble samples were examined. Practical geometry conditions and expressions for the acoustic resonance quality factor and loss, are given. This resonance phenomenon is used for high amplification of small acoustic signals and for the signature identification of surface and subsurface soft features in acoustic microscopy. A dedicated 3D image processing software has been used to extract detailed images of the scanned objects in resonance.
UR - http://www.scopus.com/inward/record.url?scp=0030565872&partnerID=8YFLogxK
U2 - 10.1016/S0169-4332(96)00397-2
DO - 10.1016/S0169-4332(96)00397-2
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AN - SCOPUS:0030565872
SN - 0169-4332
VL - 106
SP - 491
EP - 497
JO - Applied Surface Science
JF - Applied Surface Science
ER -