Microhardness analysis of diamond-like carbon films

A microhardness analysis of amorphous diamond-like carbon (a:DLC) films, synthesized from methane by the RF glow discharge method was carried out. It was performed using a standard tester PMT-3, which consisted of a flat field microscope and a diamond stylus probe. Vickers indentation measurements were taken using constant loads of 10 g, 20 g, 30 g, 50 g and 60 g in a continuous pressure. It was shown that the microhardness of the a:DLC thin films strongly depended on the methodological principles of the measurement technique and the instrumentation used. An iteration method was applied to choose the correct load value. Each load was accompanied by a metallographical control of the indentor stamps quality. Best results were obtained for 10 g, 20 g and 30 g loads. The analysis is based on the empirical approach^(1-13) and the cavity model of the indentation hardness.⁽¹⁴⁾.