Metal wire cutting by repeated application of low-power laser pulses

Joseph B. Bernstein; Simon S. Cohen; Peter W. Wyatt

doi:10.1063/1.1143758

Metal wire cutting by repeated application of low-power laser pulses

Joseph B. Bernstein, Simon S. Cohen, Peter W. Wyatt

Research output: Contribution to journal › Article › peer-review

Abstract

Thermomechanical fatigue, induced by the repeated application of a sufficiently powerful laser pulse, will eventually cause a metallic film to fail. This principle is proposed to cut metal lines for deletive redundancy in microelectronics. Aluminum alloy wires were cut with a series of 5 μs pulses from an argon ion source. The power required to cut 4-μm-wide, 0.75-μm-thick lines was reduced by as much as 87% from that of a single 5 μs laser pulse. By comparison to a single pulse of equal total time, a 70% reduction in power has been realized.

Original language	English
Pages (from-to)	3516-3518
Number of pages	3
Journal	Review of Scientific Instruments
Volume	63
Issue number	6
DOIs	https://doi.org/10.1063/1.1143758
State	Published - 1992
Externally published	Yes

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@article{6f9e44863bcf48da90fa1cc5a3a2eb76,

title = "Metal wire cutting by repeated application of low-power laser pulses",

abstract = "Thermomechanical fatigue, induced by the repeated application of a sufficiently powerful laser pulse, will eventually cause a metallic film to fail. This principle is proposed to cut metal lines for deletive redundancy in microelectronics. Aluminum alloy wires were cut with a series of 5 μs pulses from an argon ion source. The power required to cut 4-μm-wide, 0.75-μm-thick lines was reduced by as much as 87\% from that of a single 5 μs laser pulse. By comparison to a single pulse of equal total time, a 70\% reduction in power has been realized.",

author = "Bernstein, \{Joseph B.\} and Cohen, \{Simon S.\} and Wyatt, \{Peter W.\}",

year = "1992",

doi = "10.1063/1.1143758",

language = "אנגלית",

volume = "63",

pages = "3516--3518",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

number = "6",

}

TY - JOUR

T1 - Metal wire cutting by repeated application of low-power laser pulses

AU - Bernstein, Joseph B.

AU - Cohen, Simon S.

AU - Wyatt, Peter W.

PY - 1992

Y1 - 1992

N2 - Thermomechanical fatigue, induced by the repeated application of a sufficiently powerful laser pulse, will eventually cause a metallic film to fail. This principle is proposed to cut metal lines for deletive redundancy in microelectronics. Aluminum alloy wires were cut with a series of 5 μs pulses from an argon ion source. The power required to cut 4-μm-wide, 0.75-μm-thick lines was reduced by as much as 87% from that of a single 5 μs laser pulse. By comparison to a single pulse of equal total time, a 70% reduction in power has been realized.

AB - Thermomechanical fatigue, induced by the repeated application of a sufficiently powerful laser pulse, will eventually cause a metallic film to fail. This principle is proposed to cut metal lines for deletive redundancy in microelectronics. Aluminum alloy wires were cut with a series of 5 μs pulses from an argon ion source. The power required to cut 4-μm-wide, 0.75-μm-thick lines was reduced by as much as 87% from that of a single 5 μs laser pulse. By comparison to a single pulse of equal total time, a 70% reduction in power has been realized.

UR - https://www.scopus.com/pages/publications/36449004016

U2 - 10.1063/1.1143758

DO - 10.1063/1.1143758

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???

AN - SCOPUS:36449004016

SN - 0034-6748

VL - 63

SP - 3516

EP - 3518

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 6

ER -

Metal wire cutting by repeated application of low-power laser pulses

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