TY - JOUR
T1 - Metal wire cutting by repeated application of low-power laser pulses
AU - Bernstein, Joseph B.
AU - Cohen, Simon S.
AU - Wyatt, Peter W.
PY - 1992
Y1 - 1992
N2 - Thermomechanical fatigue, induced by the repeated application of a sufficiently powerful laser pulse, will eventually cause a metallic film to fail. This principle is proposed to cut metal lines for deletive redundancy in microelectronics. Aluminum alloy wires were cut with a series of 5 μs pulses from an argon ion source. The power required to cut 4-μm-wide, 0.75-μm-thick lines was reduced by as much as 87% from that of a single 5 μs laser pulse. By comparison to a single pulse of equal total time, a 70% reduction in power has been realized.
AB - Thermomechanical fatigue, induced by the repeated application of a sufficiently powerful laser pulse, will eventually cause a metallic film to fail. This principle is proposed to cut metal lines for deletive redundancy in microelectronics. Aluminum alloy wires were cut with a series of 5 μs pulses from an argon ion source. The power required to cut 4-μm-wide, 0.75-μm-thick lines was reduced by as much as 87% from that of a single 5 μs laser pulse. By comparison to a single pulse of equal total time, a 70% reduction in power has been realized.
UR - http://www.scopus.com/inward/record.url?scp=36449004016&partnerID=8YFLogxK
U2 - 10.1063/1.1143758
DO - 10.1063/1.1143758
M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???
AN - SCOPUS:36449004016
SN - 0034-6748
VL - 63
SP - 3516
EP - 3518
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
IS - 6
ER -