Lossless compression of rotated maskless lithography images

Shmuel Tomi Klein, Dana Shapira, Gal Shelef

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

A new lossless image compression algorithm is presented, aimed at maskless lithography systems with mostly right-angled regular structures. Since these images appear often in slightly rotated form, an algorithm dealing with this special case is suggested, which improves performance relative to the state of the art alternatives.

Original languageEnglish
Title of host publicationString Processing and Information Retrieval - 20th International Symposium, SPIRE 2013, Proceedings
Pages186-196
Number of pages11
DOIs
StatePublished - 2013
Externally publishedYes
Event20th International Symposium on String Processing and Information Retrieval, SPIRE 2013 - Jerusalem, Israel
Duration: 7 Oct 20139 Oct 2013

Publication series

NameLecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
Volume8214 LNCS
ISSN (Print)0302-9743
ISSN (Electronic)1611-3349

Conference

Conference20th International Symposium on String Processing and Information Retrieval, SPIRE 2013
Country/TerritoryIsrael
CityJerusalem
Period7/10/139/10/13

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