TY - GEN
T1 - Integrating Critical Queue Time Constraints into SMT2020 Simulation Models
AU - Kopp, Denny
AU - Hassoun, Michael
AU - Kalir, Adar
AU - Monch, Lars
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/12/14
Y1 - 2020/12/14
N2 - In this paper, we study the impact of critical queue time (CQT) constraints in semiconductor wafer fabrication facilities (wafer fabs). Process engineers impose CQT constraints that require wafers to start a subsequent operation within a given time window after a certain operation is completed to prevent native oxidation and contamination effects on the wafer surface. We equip dataset 2 of the SMT2020 testbed with production control logic to avoid CQT constraint violations. Therefore, two different CQT-aware dispatching rules and a combination of a lot stopping strategy with these rules are proposed. The effect of the production control strategies is investigated by means of a simulation study. We show that the number of CQT violations can be reduced without large deteriorations of global performance measures such as cycle time and throughput.
AB - In this paper, we study the impact of critical queue time (CQT) constraints in semiconductor wafer fabrication facilities (wafer fabs). Process engineers impose CQT constraints that require wafers to start a subsequent operation within a given time window after a certain operation is completed to prevent native oxidation and contamination effects on the wafer surface. We equip dataset 2 of the SMT2020 testbed with production control logic to avoid CQT constraint violations. Therefore, two different CQT-aware dispatching rules and a combination of a lot stopping strategy with these rules are proposed. The effect of the production control strategies is investigated by means of a simulation study. We show that the number of CQT violations can be reduced without large deteriorations of global performance measures such as cycle time and throughput.
UR - http://www.scopus.com/inward/record.url?scp=85103903136&partnerID=8YFLogxK
U2 - 10.1109/WSC48552.2020.9383889
DO - 10.1109/WSC48552.2020.9383889
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AN - SCOPUS:85103903136
T3 - Proceedings - Winter Simulation Conference
SP - 1813
EP - 1824
BT - Proceedings of the 2020 Winter Simulation Conference, WSC 2020
A2 - Bae, K.-H.
A2 - Feng, B.
A2 - Kim, S.
A2 - Lazarova-Molnar, S.
A2 - Zheng, Z.
A2 - Roeder, T.
A2 - Thiesing, R.
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2020 Winter Simulation Conference, WSC 2020
Y2 - 14 December 2020 through 18 December 2020
ER -