Heavy-ion-induced soft breakdown of thin gate oxides

  • J. F. Conley
  • , J. S. Suehle
  • , A. H. Johnston
  • , B. Wang
  • , T. Miyahara
  • , E. M. Vogel
  • , J. B. Bernstein

Research output: Contribution to journalConference articlepeer-review

48 Scopus citations

Abstract

Heavy-ion induced soft and hard breakdown of thin gate oxide films was investigated. The heavy-ion-induced breakdown was studied as a function of linear energy transfer (LET), fluence and voltage applied during irradiation. The post irradiation oxide conduction was described by the Suñe quantum point contact model.

Original languageEnglish
Pages (from-to)1913-1916
Number of pages4
JournalIEEE Transactions on Nuclear Science
Volume48
Issue number6 I
DOIs
StatePublished - Dec 2001
Externally publishedYes
Event2001 Nuclear and Sapce Radiation Effects Conference (NSREC) - Vancouver, BC, Canada
Duration: 16 Jul 200120 Jul 2001

Keywords

  • Dielectric breakdown
  • Gate oxide
  • Heavy ions
  • MOS
  • Microelectronics
  • Radiation
  • SiO

Fingerprint

Dive into the research topics of 'Heavy-ion-induced soft breakdown of thin gate oxides'. Together they form a unique fingerprint.

Cite this