Heavy-ion-induced soft breakdown of thin gate oxides

J. F. Conley, J. S. Suehle, A. H. Johnston, B. Wang, T. Miyahara, E. M. Vogel, J. B. Bernstein

Research output: Contribution to journalConference articlepeer-review

47 Scopus citations

Abstract

Heavy-ion induced soft and hard breakdown of thin gate oxide films was investigated. The heavy-ion-induced breakdown was studied as a function of linear energy transfer (LET), fluence and voltage applied during irradiation. The post irradiation oxide conduction was described by the Suñe quantum point contact model.

Original languageEnglish
Pages (from-to)1913-1916
Number of pages4
JournalIEEE Transactions on Nuclear Science
Volume48
Issue number6 I
DOIs
StatePublished - Dec 2001
Externally publishedYes
Event2001 Nuclear and Sapce Radiation Effects Conference (NSREC) - Vancouver, BC, Canada
Duration: 16 Jul 200120 Jul 2001

Keywords

  • Dielectric breakdown
  • Gate oxide
  • Heavy ions
  • MOS
  • Microelectronics
  • Radiation
  • SiO

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