Experimental study for low resistance interline connections using pulsed laser techniques

Kuan Jung Chung, Joseph B. Bernstein, J. I. Luo, J. Ari Tuchman, Zheng K. Ma

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	2005 Quantum Electronics and Laser Science Conference (QELS)
Pages	1564-1566
Number of pages	3
State	Published - 2005
Externally published	Yes
Event	2005 Quantum Electronics and Laser Science Conference (QELS) - Baltimore, MD, United States Duration: 22 May 2005 → 27 May 2005

Name	Quantum Electronics and Laser Science Conference (QELS)
Volume	3

Conference	2005 Quantum Electronics and Laser Science Conference (QELS)
Country/Territory	United States
City	Baltimore, MD
Period	22/05/05 → 27/05/05

Cite this

@inproceedings{dab391f874a441feb4100b412d70980f,

title = "Experimental study for low resistance interline connections using pulsed laser techniques",

author = "Chung, {Kuan Jung} and Bernstein, {Joseph B.} and Luo, {J. I.} and Tuchman, {J. Ari} and Ma, {Zheng K.}",

year = "2005",

language = "אנגלית",

isbn = "1557527962",

series = "Quantum Electronics and Laser Science Conference (QELS)",

pages = "1564--1566",

booktitle = "2005 Quantum Electronics and Laser Science Conference (QELS)",

note = "2005 Quantum Electronics and Laser Science Conference (QELS) ; Conference date: 22-05-2005 Through 27-05-2005",

}

Chung, KJ, Bernstein, JB, Luo, JI, Tuchman, JA & Ma, ZK 2005, Experimental study for low resistance interline connections using pulsed laser techniques. in 2005 Quantum Electronics and Laser Science Conference (QELS). Quantum Electronics and Laser Science Conference (QELS), vol. 3, pp. 1564-1566, 2005 Quantum Electronics and Laser Science Conference (QELS), Baltimore, MD, United States, 22/05/05.

Experimental study for low resistance interline connections using pulsed laser techniques. / Chung, Kuan Jung; Bernstein, Joseph B.; Luo, J. I. et al.
2005 Quantum Electronics and Laser Science Conference (QELS). 2005. p. 1564-1566 (Quantum Electronics and Laser Science Conference (QELS); Vol. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Experimental study for low resistance interline connections using pulsed laser techniques

AU - Chung, Kuan Jung

AU - Bernstein, Joseph B.

AU - Luo, J. I.

AU - Tuchman, J. Ari

AU - Ma, Zheng K.

PY - 2005

Y1 - 2005

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AN - SCOPUS:27144478069

SN - 1557527962

T3 - Quantum Electronics and Laser Science Conference (QELS)

SP - 1564

EP - 1566

BT - 2005 Quantum Electronics and Laser Science Conference (QELS)

T2 - 2005 Quantum Electronics and Laser Science Conference (QELS)

Y2 - 22 May 2005 through 27 May 2005

ER -