Design optimization of laser-induced microbridges for low resistance interline connections in ICs

Engineering

• Design Optimization 100%
• Interline 100%
• Silicon Dioxide 100%
• Experimental Result 50%
• Two Dimensional 50%
• Optimal Design 50%
• Finite Element Modeling 50%
• Dielectrics 50%
• Interconnects 50%
• Geometric Parameter 50%
• Process Window 50%
• Laser Beams 50%
• Finite Element Analysis 50%

Keyphrases

• Design Diagram 50%
• Metal-metal 50%
• Intersection Spacing 50%