Abstract
A bilayer structure of Pd-Al2O3 was developed as a signal plate for vidicon TV tubes. The 20 Å thick Pd layer served as the conducting plate while the 30-50 Å thick Al2O3 coating functioned as the transparent protecting film. The obtained signal plates had a sheet resistance of 2.5 KΩ and a transmission coefficient of 71% at a wavelength of 250 nm. The main advantage of vidicons equipped with such signal plates is to have a dark current of less than 0.05 nA, which is suitable for UV applications. The Pd-Al2O3 bilayers were produced by a novel sputtering method.
| Original language | English |
|---|---|
| Pages (from-to) | 235-238 |
| Number of pages | 4 |
| Journal | Thin Solid Films |
| Volume | 283 |
| Issue number | 1-2 |
| DOIs | |
| State | Published - 1 Sep 1996 |
| Externally published | Yes |
Keywords
- Aluminium
- Aluminium oxide
- Palladium