TY - GEN
T1 - Analyzing the process window for laser copper-link processing
AU - Lee, Joohan
AU - Ehrmann, Jonathan S.
AU - Smart, Donald V.
AU - Griffiths, Joseph J.
AU - Bernstein, Joseph B.
PY - 2002/12
Y1 - 2002/12
N2 - Control of laser pulse shape and polarization improves the reliability of laser processing of copper links used for circuit redundancy. Using finite element modeling, simulation shows that fast-rise-time laser pulses give a unique pulse shape that helps avoid lower corner cracking by initiating upper corner cracking and stress relief. Polarization variation enables control of hole size by changing energy coupling into the link, thereby increasing the process window significantly.
AB - Control of laser pulse shape and polarization improves the reliability of laser processing of copper links used for circuit redundancy. Using finite element modeling, simulation shows that fast-rise-time laser pulses give a unique pulse shape that helps avoid lower corner cracking by initiating upper corner cracking and stress relief. Polarization variation enables control of hole size by changing energy coupling into the link, thereby increasing the process window significantly.
UR - http://www.scopus.com/inward/record.url?scp=0036935098&partnerID=8YFLogxK
M3 - מאמר בכתב עת
AN - SCOPUS:0036935098
SN - 0038-111X
VL - 45
SP - 63-64+66
JO - Solid State Technology
JF - Solid State Technology
ER -