Abstract
A novel type of electrostatic probe was used for studying the plane plasma discharge of relatively low pressure. This electrostatic probe, based on the usual K-type thermocouple, also known as "Active Langmuir Probe", generates a thermoelectric voltage. This thermoelectric voltage is used for plasma investigation in studies of metal contact properties. A qualitative and quantitative analyses of the Active Langmuir Probe are presented in this work. Experimental studies have shown that the measured thermoelectric voltage corresponds with the temperatures, exceeding the melting point of the measuring probe itself.
Original language | English |
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Pages (from-to) | 1417-1422 |
Number of pages | 6 |
Journal | Journal of Optoelectronics and Advanced Materials |
Volume | 5 |
Issue number | 5 |
State | Published - 2003 |
Externally published | Yes |
Keywords
- Langmuir probe
- Plane plasma discharge
- Thermocouple