ملخص
A novel target-holder construction for sputtering machines was developed and found to be most useful and effective for multi-target processes. The main advantages of this target holder are that it guarantees a good contact between the target material and the water cooled surface of the target-holder, it enables a quick target replacement, it provides a shielding protection against the rest of the non operative areas of the target holder and it improves the sputtering machine maintenance process.
| اللغة الأصلية | الإنجليزيّة |
|---|---|
| الصفحات | 456-458 |
| عدد الصفحات | 3 |
| حالة النشر | نُشِر - 1996 |
| منشور خارجيًا | نعم |
| الحدث | Proceedings of the 1996 19th Convention of Electrical and Electronics Engineers in Israel - Jerusalem, Isr المدة: ٥ نوفمبر ١٩٩٦ → ٦ نوفمبر ١٩٩٦ |
!!Conference
| !!Conference | Proceedings of the 1996 19th Convention of Electrical and Electronics Engineers in Israel |
|---|---|
| المدينة | Jerusalem, Isr |
| المدة | ٥/١١/٩٦ → ٦/١١/٩٦ |