Microhardness analysis of diamond like carbon films

E. Rabinovitch, A. Axelevitch, G. Golan, L. Klibanov, N. Croitoru, A. Seidman

نتاج البحث: نتاج بحثي من مؤتمرمحاضرةمراجعة النظراء

1 اقتباس (Scopus)

ملخص

Microhardness analysis of Diamond-Like Carbon (DLC) films deposited by PECVD, using R.F. generator was carried out. This analysis was realized by a standard tester PMT-3 which consists of a flat field optical microscope and a diamond stylus probe. Vickers indentation measurements were done with constant loads of: 10 g, 20 g, 30 g, 50 g, 60 g and 70 g in a continuous pressure. It was shown that microhardness results of the DLC thin films are strongly dependent on the methodological principles of the measurement technique and instrumentation. An iterations method was used in order to choose the correct load value. Every loading was accompanied with a metallographical control of the indentor's stamps quality. Best results were obtained for 10 g, 20 g and 30 g loads. The analysis is based on the empirical approach and the 'cavity model' of the indentation hardness.

اللغة الأصليةالإنجليزيّة
الصفحات452-455
عدد الصفحات4
حالة النشرنُشِر - 1996
منشور خارجيًانعم
الحدثProceedings of the 1996 19th Convention of Electrical and Electronics Engineers in Israel - Jerusalem, Isr
المدة: ٥ نوفمبر ١٩٩٦٦ نوفمبر ١٩٩٦

!!Conference

!!ConferenceProceedings of the 1996 19th Convention of Electrical and Electronics Engineers in Israel
المدينةJerusalem, Isr
المدة٥/١١/٩٦٦/١١/٩٦

بصمة

أدرس بدقة موضوعات البحث “Microhardness analysis of diamond like carbon films'. فهما يشكلان معًا بصمة فريدة.

قم بذكر هذا