Bistable Micro Caps Fabricated by Sheet Metal Forming

A. Asher, E. Benjamin, L. Medina, R. Gilat, S. Krylov

نتاج البحث: نشر في مجلةمقالةمراجعة النظراء

14 اقتباسات (Scopus)

ملخص

Traditional fabrication techniques are not suitable for the manufacturing of three-dimensional micro-scale structures. In this work, we report on a modified self molding punch-less sheet forming technique allowing fabrication of initially curved, non-planar, shallow micro shells. These structures, when appropriately configured, may exhibit the coexistence of two equilibria under the same loading. A ≈ 400 nm thick layer of Al, or ≈ 2.5 µm of Cu was deposited on top of a Si wafer. Next, circular openings of the radii varying between ≈ 100 µm and up to ≈ 700 µm were created in the Si substrate by means of the deep reactive ion etching (DRIE), with the metallic layer serving as the etch stop. Finally, the circular free-standing metallic sheet was pressed by a soft uniform foam layer serving as a stamp and pushing the metal foil into the opening in the wafer. Induced plastic deformation resulted in a residual strain shaping an initially planar metal sheet into a shallow cap with the midpoint elevations up to ≈ 50 µm. Metallic as well as metal-polymer bimorph caps, of the thickness varying between ≈ 400 nm and up to ≈ 2.5 µm and of the desired curvature, were successfully fabricated by the suggested process. Snap-through and snap-back of the fabricated devices under mechanical and electrostatic actuation was demonstrated experimentally.

اللغة الأصليةالإنجليزيّة
رقم المقال065002
دوريةJournal of Micromechanics and Microengineering
مستوى الصوت30
رقم الإصدار6
المعرِّفات الرقمية للأشياء
حالة النشرنُشِر - يونيو 2020

بصمة

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